Display, SEMI Field
Parts coatings used for Plasma Chamber during semiconductor, OLED and Solar Cell processes can improve yields and productivity, such as stability of Particle and atmosphere and extension of part life.
Development of high dense film Y2O3, Al2O3, YAG, YOF
We laminate the yttria very densely by using the multiple electrode plasma.coating applying the high-purity thermal spray powder
extension of PM cycle
It can increase the cost competitiveness by extending lifespan of partsStabilization of voltage supply
Possible to apply to the existing APS coating
Improvement of production yield
It can improve the defective percent by increasing the production yieldStable voltage supply through stable output of multiple electrode and rectification method of inverter
Patent on fluidification technology of minute thermal spray powder
SW-YT35
SW-YT25
SW-YT15
Diagram
Parts List