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Business

Company endeavoring to satisfy customers with
the continuous technology development and facility investment

thermal spray

Display, SEMI Field - Korea thermal spray, semicon y2o3 powder

Display, SEMI Field

Parts coatings used for Plasma Chamber during semiconductor, OLED and Solar Cell processes can improve yields and productivity, such as stability of Particle and atmosphere and extension of part life. Formation of High Dense Film - Korea thermal spray, semicon y2o3 powder

Development of high dense film Y2O3, Al2O3, YAG, YOF

We laminate the yttria very densely by using the multiple electrode plasma.
It can produce high quality products because the etching resistance of halogen gas plasma environment can increase the overhaul time of chamber and minimize the particles inside chamber.
  • coating applying the high-purity thermal spray powder

  • extension of PM cycle

    It can increase the cost competitiveness by extending lifespan of parts
  • Stabilization of voltage supply

  • Possible to apply to the existing APS coating

  • Improvement of production yield

    It can improve the defective percent by increasing the production yield
  • Stable voltage supply through stable output of multiple electrode and rectification method of inverter

  • Patent on fluidification technology of minute thermal spray powder

  • SW-YT35
    SW-YT25
    SW-YT15

Diagram

Parts List

  • TOP PROTECTOR_1/2/3/4
  • CLEANKIT_A/B
  • CLEANKIT_SUPPORT LINER CENTER_L/R
  • CLEANKIT_SUPPORT MIDDL CENTER_L/R
  • CLEANKIT_SUPPORT BLOCK A/B/C/D
  • CERAMIC CAP
  • CERAMIC CAP_S/L